Method of making semiconductor device using an interconnect

ABSTRACT

The present invention includes an embodiment that relates to method of forming an interconnect. The method includes the effect of reducing electromigration in a metallization. An article achieved by the inventive method includes a first interconnect disposed above a substrate; a first conductive diffusion barrier layer disposed above and on the first interconnect; an upper interconnect, that is either landed or unlanded and that is disposed above the first interconnect; and an upper conductive diffusion barrier layer disposed above and on the upper interconnect.

BACKGROUND OF THE INVENTION

[0001] 1. Field of the Invention

[0002] The present invention relates to via and trench metallization inan integrated circuit. More particularly, the present invention relatesto a simplified introduction, patterning, and formation ofmultiple-layer interconnections in a semiconductor structure.

[0003] 2. Description of the Related Art

[0004] Integrated circuits use conductive contacts and interconnects towire together the individual devices on a semiconductor substrate, or tocommunicate external to the integrated circuit. Interconnectmetallization for vias and trenches may include aluminum alloys andcopper. A typical method of forming an interconnect is a damasceneprocess that involves forming a via recess and an overlying trenchrecess in a dielectric material. The via recess and the trench recess(hereinafter referred to as “recess”) is lined with a barrier layer.Where deposition assistance is required, a conductive seed material isdeposited in the recess. Interconnect material is introduced into therecess, the semiconductor structure may be planarized, and a dielectricmaterial may be formed over the interconnect.

[0005] Copper has recently been introduced as an interconnect material.But copper has technical challenges such as poor adherence todielectrics and the resulting electromigration by the copper materialduring device use. Another problem for copper is poor recess fillproperties that result in voids. Additionally, of copper may blister orform hillocks during thermal processing.

[0006] As integrated circuits become more complex, process integrationrequires several processes such as forming etch stop and diffusionbarrier layers in the interlayer dielectrics that surround interconnect.Additionally, because the real estate of a semiconductor device issubject to miniaturization, often multi-level interconnects arerequired. Typically, metallizations may be numbered, such as metal-one(M1) up to and exceeding metal-six (M6). With copper, the requirement ofseveral layers of metallization becomes increasingly complicated by theassociated requirement of etch stop and diffusion barrier structures ateach level. Further, a high-density interconnect layout can require viasthat do not fully land on the underlying metal layer. Unlanded vias mayhave significantly reduced electrical connection to the lowermetallization that will result in both process yield lowering and infield failures.

BRIEF DESCRIPTION OF THE DRAWINGS

[0007] In order to illustrate the manner in which embodiments of theinvention are obtained, a more particular description of the inventionbriefly described above will be rendered by reference to specificembodiments thereof which are illustrated in the appended drawings.Understanding that these drawings depict only typical embodiments of theinvention that are not necessarily drawn to scale and are not thereforeto be considered to be limiting of its scope, the invention will bedescribed and explained with additional specificity and detail throughthe use of the accompanying drawings in which:

[0008]FIG. 1A is an elevational cross-section of a semiconductorstructure that depicts a stacked-interconnect structure according to anembodiment;

[0009]FIG. 1B is an elevational cross-section of a semiconductorstructure that depicts an unlanded stacked-interconnect structureaccording to an embodiment;

[0010]FIGS. 2A and 2B are elevational cross-sections of othersemiconductor structure embodiments that depict landed and unlandedstacked-interconnect structures, respectively;

[0011]FIGS. 3A and 3B are elevational cross-sections of othersemiconductor structure embodiments that depict landed and unlandedstacked-interconnect structures, respectively;

[0012]FIGS. 4A and 4B are elevational cross-sections of othersemiconductor structure embodiments that depict landed and unlandedstacked-interconnect structures, respectively;

[0013]FIGS. 5A and 5B are elevational cross-sections of othersemiconductor structure embodiments that depict landed and unlandedstacked-interconnect structures, respectively according to anembodiment;

[0014]FIGS. 6A and 6B are elevational cross-sections of othersemiconductor structure embodiments that depict landed and unlandedstacked-interconnect structures, respectively;

[0015]FIG. 7 is a process flow depiction according to an embodiment;

[0016]FIG. 8 is an elevational cross-section drawing of aphotomicrograph according to an embodiment; and

[0017]FIG. 9 is an cross-section drawing according to an embodiment

DETAILED DESCRIPTION OF THE INVENTION

[0018] The present invention relates to a multi-level metallizationstructure that uses a conductive shunt. An embodiment of the presentinvention relates to preparing a recess to receive interconnectmaterial. Preparation of the recess may include deposition of variousfilms thereinto, including at least one of a diffusion barrier film, aconductive seed film, and a shunt film. Another embodiment of thepresent invention relates to the interconnect material that is depositedinto the recess.

[0019] Another embodiment of the present invention relates to aconductive shunt layer that is deposited upon a lower interconnect atthe junction between the lower interconnect and an upper interconnect.Another embodiment of the present invention relates to a conductiveshunt layer that is disposed upon a lower contact at the juncturebetween the lower contact and an upper contact. Another embodiment ofthe present invention relates to various process flows that achieve theparticular conductive shunt layer. Another embodiment of the presentinvention relates to various conductive shunt layer architectures thatincorporate various interlayer dielectric (ILD) combinations.

[0020] In one embodiment, an interconnect structure is disclosed thatincludes a conductive shunt material. The conductive shunt materialprovides various article qualities for the interconnect structure. Onequality is that the conductive shunt material acts as a diffusionbarrier for the copper. Another quality is that the conductive shuntmaterial acts as an etch stop during fabrication of embodiments. Theconductive shunt material may, for example, contain the interconnectionmaterial that also acts to contain copper interconnection material in arecess. It may encapsulate the interconnection material, such as bylining the walls of the recess with a conductive shunt film. Theconductive shunt material is selected, in one aspect, for the beneficialattributes toward improving an interconnect structure. In terms ofinterconnect structures comprising copper, for example, such attributesinclude but are not limited to, reduced electromigration, improvedadhesion to dielectric material, and reduction of hillocks orblistering.

[0021]FIG. 1A is a cross-section that depicts a first embodiment of anarticle. A semiconductor structure 100 that has at least one activedevice as in known in the art with a landed via is depicted with twolevels of metallization, disposed above a substrate 110. FIG. 1B is across-section that depicts an unlanded via embodiment of a semiconductorstructure 101. Except for the unlanded configuration, structures inFIGS. 1A and 1B are similar. Substrate 110 may be, for example, aconductive layer or a semiconductive layer. A microprocessor chip mayhave up to six or more interconnection levels that are set apart byinterlayer dielectric (ILD) layers. Semiconductor structures 100 and 101include a first interconnect 112, disposed above substrate 110, a firstconductive diffusion barrier layer 114, an upper (in this instance, asecond) interconnect 116 (FIG. 1A) and 117 (FIG. 1B) that is disposedabove first interconnect 112. Additionally, an upper (in this instance,a second) conductive diffusion barrier layer 118 (FIG. 1A) and 119 (FIG.1B) is disposed above and on upper interconnect 116. The upperinterconnect 117 in FIG. 1B fills an unlanded contact corridor asillustrated. The conductive diffusion barrier layers 114, 118, and 119are conductive shunt materials.

[0022]FIGS. 1A and 1B depict an interconnect zone 120 that defines asurface area for electrical connection. First interconnect 112 isdisposed in a dual-damascene recess that may be formed by a two-stepetch that first opens a smaller recess by an anisotropic etch, and thatsecond opens a larger recess but that also extends the first, smallerrecess to create interconnect zone 120. For example, a via and trenchrecess is formed by initially using a mask, such as a photoresist maskto define an area for a via opening, and by etching the via with asuitable chemistry, such as, for example, a CH₃/CF₄ or C₄F₈ etchchemistry for a SiC dielectric material. The photoresist mask may thenbe removed such as by an oxygen plasma to remove a photoresist, and asecond mask may be patterned to define a greater area for a trenchopening. A subsequent mask and etch is introduced to form a trench andthe second mask is removed leaving the substrate shown in FIGS. 1A and1B.

[0023] The dual-damascene recess includes a via 122 and a trench 124.Other etch techniques for forming a recess are set forth herein. In anyevent, first interconnect 112 is disposed in a first recess 122, 124that is made in a first ILD layer 126, and upper interconnect 116 (FIG.1A) and 117 (FIG. 1B) are disposed in an upper recess that includes avia 128 and a trench 130, and that is formed in an upper ILD layer 132.The ILD layer(s) are made of a dielectric material known in the art. Forexample, it may be silicon dioxide (SiO₂) that is formed by thedecomposition a tetraethylortho silicate (TEOS) or a plasma enhancedchemical vapor deposition (PECVD) source. The dielectric material mayalso be a material having a dielectric constant less than the dielectricconstant of SiO₂ including polymers as known in the art.

[0024] In one embodiment, the recesses are lined with a film thatimproves adhesion of the interconnect material, and that lowersdiffusion of the interconnect material. By way of non-limiting example,FIGS. 1A and 1B also show the substrate having barrier film 134 formedalong the side walls and bottom of the via 122 and trench 124. In oneembodiment, barrier film 134 is deposited to a thickness in a range fromabout 10-50 nanometers (nm). Barrier film 134 inhibits interconnectmaterial diffusion, such as copper diffusion into first ILD layer 126.Barrier film 134 also has adhesion qualities. Examples of compositionsfor barrier film 134 include metals such as tantalum (Ta), tungsten (W),titanium (Ti), cobalt (Co), combinations thereof, and other refractorymetals. Other examples include nitrides such as tantalum nitride (TaN),tungsten nitride (WN), titanium nitride (TiN), combinations thereof, andother refractory metal nitrides. Other examples include silicon nitridessuch as tantalum silicon nitride (TaSiN), tungsten silicon nitride(WSiN), titanium silicon nitride (TiSiN), combinations thereof, andother refractory metal silicon nitrides.

[0025] Barrier film 134 may be introduced by conventional techniques,such as chemical vapor deposition (CVD). In one embodiment, barrier film134 is introduced as a blanket over first ILD layer 126 and along theside walls and bottom of via 122 and along the side walls of trench 124.As to the upper recess, barrier film 134 is introduced as a blanket oversecond ILD layer 132 and along the side walls and bottom of via 128 andalong the side walls of trench 130.

[0026] In another embodiment, a conductive seed film 136 is formed overthe barrier film 134. Conductive seed film 136 may be provided as apreparation for plating techniques such as electroplating andelectroless plating. In one embodiment, conductive seed film 136 is acopper material that is formed by CVD or physical vapor deposition (PVD)techniques. In one embodiment, conductive seed film 136 is formed to athickness in a range from about 400 Å to about 5,000 Å. In oneembodiment, conductive seed film 136 is formed to a thickness of about3,000 Å. It is noted that a barrier film 134 and a conductive seed film136 are also formed in the upper recess of via 128 and trench 130. Afterthe formation of upper conductive barrier layers 118 (FIG. 1A) and 119(FIG. 1B), another ILD layer 138 may be formed.

[0027]FIGS. 1A and 1B depict semiconductor structures 100 and 101 afterfilling the recesses with first interconnect 112 and interconnectcontact 116 (FIG. 1A) and 117 (FIG. 1B). According to an embodiment, theinterconnect material is selected to be an improvement over the aluminumtechnology. First interconnect 112 and upper interconnect 116 may beformed by electroplating. The electroplating process is carried out byimmersing or contacting a wafer with an aqueous solution containingmetal ions, such as copper sulfate-based solution, and reducing the ionsonto a cathodic surface.

[0028] Various compositions are suitable according to an embodiment.Suitable copper alloys include copper-magnesium (Cu—Mg), copper-nickel(CuNi), copper-tin (CuSn), copper-indium (CuIn), copper-cadmium (CuCd),copper-zinc (CuZn), copper-bismuth (CuBi), copper-ruthenium (CuRu),copper-rhodium (CuRh), copper-rhenium (CuRe), copper-tungsten (CuW),copper-cobalt (CuCo), copper-palladium (CuPd), copper-gold (CuAu),copper-platinum (CuPt), and copper-silver (CuAg). Alloys are formed byone of two methods. Typically, copper-tin, copper-indium,copper-cadmium, copper-bismuth, copper-ruthenium, copper-rhenium,copper-rhodium, and copper-tungsten are electroplated. Alternatively,copper may be doped with catalytic metals such as silver, platinum, tin,rhodium, and ruthenium.

[0029]FIGS. 1A and 1B depict semicontuctor structures 100 and 101 with aconductive shunt material that is also referred to as a conductivediffusion barrier layer. Above first interconnect 112, a firstconductive diffusion barrier layer 114 is disposed, and above upperinterconnect 116 (FIG. 1A) and 117 (FIG. 1b) an upper conductivediffusion barrier layer 118 and 119, respectively, is disposed. Thethickness of conductive diffusion barrier layers 114, 118, and 119 arein a range from about 5 nm to about 300 nm. This shunt materialfacilitates adhesion between the contact material and overlyingmaterials such as dielectric layers. Improved adhesion reduceselectrical migration of the interconnect structure. The shunt materialalso lowers the occurrence of blistering or hillock formation ofinterconnect material that is brought on by thermal processing andelevated operating temperatures. The shunt material also acts as an etchstop in subsequent processing.

[0030] The first conductive diffusion barrier layer 114 and the upperconductive diffusion barrier layer 116 (FIG. 1A) and 119 (FIG. 1B) arealso formed in order to contain the copper or copper-based interconnects112, 116, and 117. Various methods for obtaining conductive barrierlayer 112, 116, and 117 are used according to embodiments. For example,the conductive barrier layers 112, 116, and 117 are formed from vapordeposition processing including CVD, plasma-enhanced CVD (PECVD), atomiclayer CVD (ALCVD), and PVD.

[0031] Besides vapor depositing to form the conductive diffusion barrierlayers 114, 118, and 119, liquid plating processing may be done. Suchliquid plating processing embodiments include spray deposition,electroplating, and electroless plating. One advantage of electrolessplating of the conductive diffusion barrier layers 114, 118, and 119, isthat due to the chemically-induced oxidation-reduction reaction that iscarried out only at chemically enabled sites, no patterning needs to bedone. According to an embodiment, semiconductor structure 100 or 101 isimmersed in a bath that contains one or more metal ions, and reductionof the ions occurs at first and upper interconnects 112 and 116 (FIG.1A) and 117 (FIG. 1b), respectively. The formation of first conductivediffusion barrier layer 114 is followed by the formation of the upperILD layer 132, the dual-damascene recess formation and filling withupper interconnects 116 and 117, and finally by the formation of upperconductive diffusion barrier layers 118 and 119.

[0032] The metal ion may be selected from various metals or combinationsthereof. In one embodiment, the metal is selected from at least oneprimary metal and from zero to at least one secondary metal. In onembodiment, the primary metal is selected from the group of copper (Cu),silver (Ag), gold (Au), and combinations thereof. In one embodiment, theat least one primary metal is selected from the group of nickel (Ni),palladium (Pd), platinum (Pt), and combinations thereof. In oneembodiment, the at least one primary metal is selected from the group ofcobalt (Co), rhodium (Rh), iridium (Ir), and combinations thereof. Inanother embodiment, the at least one primary metal is selected from acombination of at least two metals that combine metals from theabove-referenced groups. In one embodiment, the primary metal(s) issupplied in a concentration range from about 2 gram/liter to about 50gram/liter. In another embodiment, the primary metal(s) is supplied in aconcentration range from about 5 gram/liter to about 35 gram/liter.

[0033] In one embodiment, at least one secondary metal is added to orused in lieu of the primary metal(s). In one embodiment, the at leastone secondary metal is selected from the group of chromium (Cr),molybdenum (Mo), tungsten (W), and combinations thereof. In anotherembodiment, the at least one secondary metal is selected from the groupof manganese (Mn), technetium (Tc), rhenium (Re), and combinationsthereof. In another embodiment, the at least one secondary metal isselected from a combination of at least two metals that combine metalsfrom the above-referenced groups. In one embodiment, the secondarymetal(s) is supplied in a concentration range from about 1 gram/liter toabout 40 gram/liter. In another embodiment, the secondary metal(s) issupplied in a concentration range from about 2 gram/liter to about 35gram/liter.

[0034] Reducing agents are provided to assist in assuring metaldeposition as the chemical environment of the substrate onto which themetal deposits continues to change. Although initial deposition of aprimary metal onto a substrate may be autocatalytic, the changingchemical environment may interrupt the autocatalytic environment. In oneembodiment, where deposition is upon a copper metal-six (Cu M6) pad asknown in the art, initial deposition will be achieved in the presence ofthe Cu M6 pad. Consequently, the copper pad substrate affects theinitial, presumably oxidation-reduction (REDOX) deposition chemistry.However, as the Cu M6 pad is covered by way of non-limiting example, bycobalt, the REDOX chemical environment changes from a cobalt-onto-copperplating, to a cobalt-onto-cobalt plating. Accordingly, a reducingagent(s) is provided to assure continued cobalt plating despite thechanged substrate environment.

[0035] The initial deposition may also not be autocatalytic. This can bedealt with by (1) counter-displacement plating or a catalytic material(such as palladium, platinum, or other suitable noble metals) onto theinterconnect material, or (2) the addition of a second reducing agent tothe plating bath by which the mixture of the two reducing agents willallow for plating in the initial and the subsequent plating environment.

[0036] In one embodiment, the electroless plating composition iscombined with from zero to at least one primary reducing agent in amixture of solvents. In one embodiment, a primary reducing agentincluding boron (B) is provided. Primary reducing agents that can beutilized for this application include ammonium, alkali metal, alkalineearth metal borohydrides, and the like, and combinations thereof. In oneembodiment, inorganic primary reducing agent embodiments include sodiumborohydride, lithium borohydride, zinc borohydride, and the like, andcombinations thereof. In one embodiment, an organic primary reducingagent is dimethylaminoborane (DMAB). In another embodiment, otheraminoboranes are used such as diethylaminoborane, morpholine borane,combinations thereof, and the like. In one embodiment, the primaryreducing agent(s) is supplied in a concentration range from about 1gram/liter to about 30 gram/liter. In another embodiment, the primaryreducing agent(s) is supplied in a concentration range from about 2gram/liter to about 20 gram/liter.

[0037] In one embodiment, a secondary reducing agent is provided toassist the changing chemical environment during deposition of theprimary metal and optional secondary metal. In one embodiment, aphosphorus-containing compound is selected as the secondary reducingagent. Phosphorus-containing compounds may include hypophosphites. Inone embodiment, the hypophosphite is selected from organichypophosphites such as ammonium hypophosphite and the like.

[0038] In one embodiment, the hypophosphite is selected from inorganichypophosphites such as sodium hypophosphite and the like. One embodimentincludes an inorganic phosphorus-containing compound such ashypophosphites of lithium, sodium, potassium, and mixtures thereof. Oneembodiment includes an inorganic phosphorus-containing compound such ashypophosphites of, magnesium, calcium, strontium, and mixtures thereof.One embodiment includes an inorganic phosphorus-containing compound suchas nickel hypophosphite and the like. One embodiment includes aninorganic phosphorus-containing compound such as hypophosphorous acidand the like.

[0039] Other secondary reducing agents are selected from sulfites,bisulfites, hydrosulfites, metabisulfites, and the like. Other secondaryreducing agents are selected from dithionates, and tetrathionates, andthe like. Other secondary reducing agents are selected fromthiosulfates, thioureas, and the like. Other secondary reducing agentsare selected from hydrazines, hydroxylamines, aldehydes, glyoxylic acid,and reducing sugars. In another embodiment, the secondary reducing agentis selected from diisobutylaluminum hydride, sodiumbis(2-methoxyethoxy)aluminum hydride, and the like.

[0040] In one embodiment, the secondary reducing agent(s) is supplied ina concentration range from about 0 gram/liter to about 5 gram/liter. Inanother embodiment, the secondary reducing agent(s) is supplied in aconcentration range from about 1 gram/liter to about 2 gram/liter.

[0041] In one embodiment, the primary reducing agent is DMA in aconcentration range from about 2 gram/liter to about 30 gram/liter, andthe secondary reducing agent is ammonium hypophosphite in aconcentration range from about 0 gram/liter to about 2 gram/liter. Otherembodiments include primary and secondary reducing agents that aresubstituted for DMAB and ammonium hypophosphite, or one of them, as longas they approximate the gram equivalent amounts of the primary andsecondary reducing agents of the DMAB and the ammonium hypophosphite.The gram equivalent amounts may be adjusted by various means, such asaccording to the comparative dissociation constants of the reducingagents.

[0042] In addition to the reducing agents, other agents may be addedsuch alkaline metal-free chelating agents. Embodiments of chelatingagents include citric acid, ammonium chloride, glycine, acetic acid,malonic acid, and the like in concentration range from about 5gram/liter to about 70 gram/liter.

[0043] A complexing agent and a buffering agent are also used to holdthe metal ion(s) in solution until deposition is appropriate. In oneembodiment, an organic sulphate salt compound is used such as ammoniumsulphate (NH)₂SO₄ and the like. Other complexing and buffering agentsmay be selected that have an effective gram equivalent amount to the(NH)₂SO₄. In one embodiment, the complexing/buffering agent is suppliedin a concentration range from about 50 gram/liter to about 1,000gram/liter. In another embodiment, the complexing/buffering agent issupplied in a concentration range from about 80 gram/liter to about 600gram/liter.

[0044] Various pH-adjusting compositions may be used including organicand inorganic bases. That a compound is basic can be easily confirmed bydipping pH test paper, measuring its aqueous solution using a pH meter,observing the discoloration caused by an indicator or measuring theadsorption of carbonic acid gas, and by other methods.

[0045] In one embodiment, the organic base compounds which can be usedinclude organic amines such as pyridine, pyrrolidine, combinationsthereof, and the like. Other embodiments include methylamine,dimethylamine, trimethylamine, combinations thereof, and the like. Otherembodiments include ethylamine, diethylamine, triethylamine,combinations thereof, and the like. Other embodiments includetetramethylammonium hydroxide (TMAH), tetraethyl ammonium hydroxide(TEAH), tetrapropyl ammonium hydroxide (TPAH), tetrabutyl ammoniumhydroxide (TBAH), combinations thereof, and the like. Other embodimentsinclude aniline, toluidine, and the like.

[0046] In one embodiment, the organic base includes TMAH in aconcentration range from about 30 mL to about 150 mL, added to a 100 mLvolume of the other constituents of the inventive electroless platingsolution. Other embodiments include the gram equivalent amounts of theorganic base compounds set forth herein.

[0047] In one embodiment, the inorganic base compounds which can be usedare salts of strong bases and weak acids. In one embodiment, alkalimetal acetates, alkaline earth metal acetates, and combinations thereofare used. In one embodiment, alkali metal propionates, alkaline earthmetal propionates, and combinations thereof are used. In one embodiment,alkali metal carbonates, alkaline earth metal carbonates, andcombinations thereof are used. In one embodiment, alkali metalhydroxides, alkaline earth metal hydroxides, and combinations thereofare used. In one embodiment, combinations of at least two of theacetates, propionates, carbonates, and hydroxides is used.

[0048] Inorganic base compounds may be provided in a concentration suchas a 25% NaOH in DI water solution, to make a volume of about 10 mL toabout 50 mL. This volume of solution is added to an about 100 mL volumeof the other inventive electroless plating composition constituents.Other embodiments include the gram equivalent amounts of the inorganicbase compounds set forth herein.

[0049] Other compounds may be added to the inventive electroless platingcomposition such as surface active agents. One commercial surfactant isRHODAFAC RE 610, made by Aventis (formerly Rhone-Poulenc Hoechst).Another commercial surfactant is Triton x-100T™ made by Sigma-Aldrich.Other surfactants include cystine, polyethylene glycols, polypropyleneglycol (PPG)/polyethylene glycol (PEG) (in a molecular range ofapproximately 200 to 10,000) in a concentration range of about 0.01 to 5gram/liter, and the like.

[0050] Several combinations of primary and secondary metals areachievable according to various embodiments. The primary metal mayinclude, but is not limited to from one to nine metals, selected fromcopper, silver, gold, nickel, palladium, platinum, cobalt, rhodium, andiridium. The secondary metal may include, but is not limited to fromzero to six metals selected from chromium, molybdenum, tungsten,manganese, technetium, and rhenium. In one embodiment, because of thepresence of the primary and optional secondary reducing agents, ametallic compound forms that incorporates boron and optionallyphosphorus.

[0051] In one embodiment, nickel is a primary metal for an electrolessplating embodiment, the composition includes a nickel solution to form anickel plating layer. According to an embodiment, where nickel is theprimary metal, because of the inventive electroless plating bathenvironment, metallic films form that include but are not limited bysuch combinations as NiB, NiBP, NiCrB, NiCrBP, NiMoB, NiMoBP, NiWB,NiWBP, NiMnB, NiMnBP, NiTcB, NiTcBP, NiReB, and NiReBP. Where twoprimary metals are used in solution, the inventive electroless platingbath environment may form metallic films that include but not arelimited by such combinations as to NiCoB, NiCoBP, NiCoCrB, NiCoCrBP,NiCoMoB, NiCoMoBP, NiCoWB, NiCoWBP, NiCoMnB, NiCoMnBP, NiCoTcB,NiCoTcBP, NiCoReB, and NiCoReBP. It can be seen that at least two- tonine primary metals and from zero to at least one secondary metals arecombinable according to various embodiments. In similar embodiments,palladium can be used in place of—or in addition to nickel. Similarly,platinum can be used in place of—or in addition to nickel. Additionally,a blend of at least two of nickel, palladium, and platinum can be usedas set forth herein.

[0052] In another embodiment, cobalt is a primary metal for anelectroless plating embodiment, the composition includes a cobaltsolution to form a cobalt plating layer. According to an embodiment,where cobalt is the primary metal, because of the inventive electrolessplating bath environment, metallic films form that include but are notlimited by such combinations as CoB, CoBP, CoCrB, CoCrBP, CoMoB, CoMoBP,CoWB, CoWBP, CoMnB, CoMnBP, CoTcB, CoTcBP, CoReB, and CoReBP. Where twoprimary metals are used in solution, the inventive electroless platingbath environment may form metallic films that include but not arelimited by such combinations as to NiCoB, CoPdBP, CoPdCrB, CoPdCrBP,CoPdMoB, CoPdMoBP, CoPdWB, CoPdWBP, CoPdMnB, CoPdMnBP, CoPdTcB,CoPdTcBP, CoPdReB, and CoPdReBP.

[0053] It can be seen that at least two- to nine primary metals and fromzero to at least one secondary metals are combinable according tovarious embodiments. In similar embodiments, rhodium can be used inplace of—or in addition to cobalt. Similarly, iridium can be used inplace of—or in addition to cobalt. Additionally, a blend of at least twoof cobalt, rhodium, and iridium can be used as set forth herein.

[0054] Where, by way of non-limiting example, copper is a primary metalfor an electroless plating embodiment. The composition includes a coppersolution to form a copper plating layer. According to an embodiment,where copper is the primary metal, because of the inventive electrolessplating bath environment, metallic films form that include but are notlimited by such combinations as CuB, CuBP, CuCrB, CuCrBP, CuMoB, CuMoBP,CuWB, CuWBP, CuMnB, CuMnBP, CuTcB, CuTcBP, CuReB, and CuReBP. Where twoprimary metals are used in solution, the inventive electroless platingbath environment may form metallic films that include but not arelimited by such combinations as to CuNiB, CuNiBP, CuNiCrB, CuNiCrBP,CuNiMoB, CuNiMoBP, CuNiWB, CuNiWBP, CuNiMnB, CuNiMnBP, CuNiTcB,CuNiTcBP, CuNiReB, and CuNiReBP. It can be seen that at least two- tonine primary metals and from zero to at least one secondary metal iscombinable according to various embodiments. In similar embodiments,silver can be used in place of—or in addition to copper. Similarly, goldcan be used in place of—or in addition to copper. Additionally, a blendof at least two of copper, silver, and gold can be used as set forthherein.

[0055] Referring again to FIGS. 1A and 1B, the metal of firstinterconnect 112 and upper interconnects 116 and 117 may be treated toimprove the uniformity of the electroless plating of the conductivediffusion barrier materials. Surface treating is done with an treatmentcompound such as a mineral acid. For example, a 1 to 20 volume percenthydrofluoric acid (HF) may be used. Other solutions include, sulfuricacid (H₂S0₄), sulfonic acids such as methanesulfonic acid (MSA),ethanesulfonic acid (ESA), propanesulfonic acid (PSA), benzene sulfonicacid (BSA), and the like.

[0056] Prior to the electroless plating process, the interconnectmaterial may be doped. In the case of doping of copper interconnectionmaterial with, for example, palladium, the doping may be accomplished byintroducing a palladium activation solution. Suitable activationsolutions include palladium chloride (0.01 to 2 g/l) and hydrochloricacid (0.01 to 30 milliliters per liter (ml/l)), acetic acid (100-600ml/l), hydrofluoric acid or ammonium fluoride (1 to 70 g/l). If dopingof copper lines with gold (Au), platinum (Pt), silver (Ag), tin (Sn),rhodium (Rh), and/or ruthenium (Ru) is required, such metals can beintroduced to the copper interconnect material by contact displacementfrom solutions containing the metal salts and acids such as hydrochloricacid, hydrofluoric acid, sulfuric acid, and nitric acid.

[0057] A top ILD layer 138 is depicted in FIGS. 1A and 1b according toan embodiment. In other embodiments (depicted in FIGS. 3A and 3B and 6Aand 6B) a top hard mask 339 and 639, respectively, is included.

[0058]FIGS. 2A and 2B depict another embodiment, wherein encapsulationof the interconnect material is achieved with the conductive diffusionbarrier material. The structures in FIGS. 2A and 2B are similar to thestructures depicted in FIGS. 1A and 1B, with the addition of aconductive diffusion barrier film 140 that is sandwiched between thebarrier film 134. It is also noted that the conductive seed film 136 ispresent in the case of the first interconnect 112 and landed uppercontact 116 encapsulation, and the barrier film 135 and the conductiveseed film 137 are present in the case of the unlanded upper interconnect117 encapsulation. Suitable materials for the conductive diffusionbarrier film and the conductive diffusion barrier layer are similar tothose described herein.

[0059] After the conductive diffusion barrier film 140 is formed, thesemiconductor structures 200 and 201 may be annealed to improve theadhesion thereof to the barrier film 134. In one embodiment, a thermalanneal is done in a reducing ambient such as nitrogen and hydrogen,hydrogen alone, or argon and hydrogen. Alternatively the anneal is donein a micro atmosphere or in a vacuum.

[0060] In this embodiment, a conductive seed film 136 (FIG. 2A) and 137(FIG. 2B) is deposited after the optional anneal process. The conductiveseed film 136 and 137 is formed as set forth herein. A suitable seedmaterial for a copper interconnect material is a copper-based metal oralloy. In one embodiment, a copper-based seed material is deposited byelectroless plating. In one embodiment, a conductive seed film is formedby contacting the structure with a bath containing copper ion of about1-5 gram/liter, EDTA of about 10-60 gram/liter, glyoxylic acid as areducing agent at about 2-20 gram/liter, and pH adjusters such as TMAHand ammonium hydroxide and a surfactant such as PEG.

[0061] After the plating of the conductive seed film, the structure mayagain be annealed to improve adhesion. In one example, the anneal isperformed in a reducing ambient such as a nitrogen/hydrogen mixture,hydrogen alone, or an argon/hydrogen mixture. Additionally a microatmosphere may be used or a vacuum environment may be used.

[0062] As depicted in FIGS. 2A and 2B, the first interconnect 112 andthe upper interconnect 116 (FIG. 2A) and 117 (FIG. 2B) are encapsulated.An encapsulated interconnect provides a better mechanical frame andimproves the electromigration performance. The encapsulated interconnectalso provides an additional barrier that resists diffusion of thecontact material. In the case of copper interconnect material,electromigration performance is limited by surface diffusion alongcopper interconnect lines. By encapsulating the interconnect materialwith the conductive diffusion barrier film and layer, the surfacediffusion is limited.

[0063] Another feature of an embodiment is the etch stop qualities ofconductive diffusion barrier layers 114, 118, and 119. The followingdiscussion (encompassing FIGS. 3A-6B) includes the encapsulationembodiment as set forth herein. It is understood, however, that thevarious configurations that follow, as well as the embodiments depictedin FIGS. 1A-1B, may or may not include the encapsulation embodiment, aswell as the barrier and conductive seed film embodiments, eitherseparately or together. Further, it is understood that one embodimentincludes no barrier and/or conductive seed films being placed into therecesses before the interconnect materials.

[0064]FIGS. 3A and 3B illustrate another embodiment in which disparatetypes of ILD layers are combined. In FIGS. 3A and 3B, first ILD layer326 is an organic material such as a polyimide layer that is formed byspin-on and cure techniques. Other organic types include SiLK® and thelike. Other organic types include FLARE® and the like made by AlliedSignal of Morristown, N.J. Surmounting first ILD layer 326 is a firsthard mask 340 that is typically an nitride material such as siliconnitride, titanium nitride, tungsten nitride, and the like. Above firsthard mask 340 is an inorganic ILD layer (referred to hereinafter asupper ILD layer) 342. It is notable that no upper hard mask is present.First hard mask 340 acts to protect the organic first ILD layer 326 fromsubsequent processing. The additional ILD layer 138 in this embodiment,is also an organic material and an additional hard mask 339 is provided.

[0065]FIGS. 4A and 4B illustrate another embodiment in which atwo-organic ILD layer architecture is made. First ILD layer 426 andupper ILD layer 432 are respectively surmounted by a first hard mask 440and a second hard mask 442.

[0066] In another embodiment, several ILD layers are formed, and adual-damascene structure results that includes organic-inorganicinterfaces. FIGS. 5A and 5B illustrate another embodiment in which afour-tier ILD layer architecture is made for a two-level interconnectstructure. A first ILD layer 526 and upper ILD layer 532 arerespectively surmounted by a first hard mask 540 and a second hard mask542. First ILD layer 526 includes a recess into which first interconnect112 is disposed. First ILD layer 526 includes an inorganic first bottomILD layer 544 and an organic first top ILD layer 546. Upper interconnect116 (FIG. 5A) or 117 (FIG. 5B) is likewise disposed in a dual-damasceneupper recess that is formed in an inorganic upper bottom ILD layer 548and an organic upper top ILD layer 550. It is noted that first hard mask540 is disposed over the first top ILD layer 546, and first hard mask540 includes an opening that defines a characteristic dimension (thewidth of first interconnect 112 as measured from side-to-side) of firstinterconnect 112 at its trench level 124. Upper hard mask 542 isdisposed over the upper top ILD layer 550 and similarly includes anopening that defines a characteristic dimension of upper interconnect116 (FIG. 5A) or 117 (FIG. 5B) at its trench level 130.

[0067] In another embodiment several ILD layers are formed, and adual-damascene structure results that also includes organic-inorganicinterfaces. FIGS. 6A and 6B illustrate one embodiment in which afour-tier ILD layer architecture is made in a two-level interconnectstructure. First interconnect 112 is disposed in a dual-damascene firstrecess that is formed in a first ILD layer 626 including an organicfirst bottom ILD layer 646 and an inorganic first top ILD layer 644.Upper interconnect 116 (FIG. 6A) and 117 (FIG. 6B) is also disposed in adual-damascene upper recess that is formed in an upper ILD layer 632including an organic upper bottom ILD layer 650 and an inorganic uppertop ILD layer 648. It is further noted that a first hard mask 640 isdisposed over the first bottom ILD layer 646. First hard mask 640includes an opening that defines a characteristic dimension (the widthof interconnect zone 120) of the first interconnect 112 that includesthe via 122. It is further noted that an upper hard mask 642 is disposedover the upper bottom ILD layer 650, and the upper hard mask 642includes an opening that similarly defines a characteristic dimension(not pictured) of the upper interconnect 116 (FIG. 5A) or 117 (FIG. 5B)that includes the via 128.

[0068] By these four-tier embodiments, it should become clear to one ofordinary skill in the art that various four-tier, two-level interconnectcombinations may be achieved wherein inorganic and organic ILD layersare combined. These combinations include those set forth in FIGS. 5A-6B,and additionally include an all-inorganic combination, an all-organiccombination, a 3-organic, 1-inorganic combination, and a 1-organic,3-inorganic combination. Additionally, a combination of a single-layerILD layer at the first or upper level, may be combined with adouble-layer ILD layer. Similarly, where the single-layer ILD layer isorganic, the double-layer ILD layer may be above or below it, and thedouble-layer ILD layer may both be organic, both be inorganic, or acombination thereof. Finally, where the single-layer ILD layer isinorganic, the double-layer ILD layer may be above or below it, and thedouble-layer ILD layer may both be organic, both be inorganic, or acombination thereof. Additionally, it is noted that the various hardmasks may be optionally omitted. These hard masks are set forth in FIGS.3-6. For example in FIGS. 6A and 6B, the hard masks 640 and 642 may beomitted.

[0069] In another embodiment, a process flow is illustrated in FIG. 7.The process 700 begins by forming 710 a first recess in a substrate. Anon-limiting example of this process is the formation of first recess122 and 124 as depicted in either FIGS. 1A and 1B or in FIGS. 5A and 5B.Next, an optional liner/barrier structure is formed 720 in the firstrecess. An embodiment of this process flow is the barrier film 134 andconductive seed film 136 in the first recess as set forth herein.Another embodiment of this process flow is the barrier film 134,conductive diffusion barrier film 138, and conductive seed film 136 inthe first recess as set forth herein. It is also notable in the case ofunlanded via embodiments that etching may cause an off-centered recessto form. In one embodiment, the formation of the films as set forthherein, allows for significant off-centered recess filling.

[0070] After the optional film formation, the first recess is filled 730with a first interconnect material. Following the formation of a firstinterconnect material, a conductive first diffusion barrier layer isformed 740 according an embodiment as set forth herein. In one exemplaryprocess flow, the conductive first diffusion barrier layer is formed byelectroless plating. Thereafter, a second or upper ILD layer is formedand a second or upper recess is formed 750 in the second or upper ILDlayer. Alternatively as set forth herein, formation 760 of one of thebarrier film etc. embodiments may be followed in the process flow forthe second or upper recess. Similarly, the second or upper recess isnext filled 770 with a second or upper interconnect material. Finally,according to this part of the process flow, a conductive second or upperdiffusion barrier layer is formed 780.

[0071] It can now be appreciated that where “upper” is used in thisdisclosure, it may mean an third architecture, a fourth, a fifth, asixth, etc. according the various levels of metallization accordingknown metallization architectures. Additionally, where a “first”architecture is depicted, it may be an architecture that has otherarchitectures disposed below it. For example referring to FIG. 1A, firstinterconnect 112 may be a metal-five (M5) interconnect, and upperinterconnect may be an M6 interconnect.

[0072]FIG. 8 is a cross-section drawing of a photomicrograph of asemiconductor structure 800 according to an embodiment. Thesemiconductor structure 800 was fabricated according to an embodimentand the resulting structure represents one exemplary embodiment. Thesubstrate 810 is an organic ILD material such as SiLK® made by DowChemical of Midland, Mich. A bottom metallization 812 that is a coppertrace, is disposed in substrate 810. A bottom hard mask 814, made of anitride material as set forth herein is disposed above substrate 810along with a bottom etch stop layer 813. Bottom hard mask 814 makes anopening that defines a characteristic dimension (the left-to-rightwidth) of bottom metallization 812. A first lower ILD layer 818 made ofSiLK® is disposed over bottom metallization 812 and bottom hard mask814. In a recess, a first interconnect 816 makes an electricalconnection between bottom metallization 812 and a first metallization820. First metallization 820 is disposed in a first upper ILD layer 822made of SiLK®. A first hard mask 824, made of a nitride material isdisposed over first upper ILD layer 822, and has an opening that definesa characteristic dimension of first metallization 820. Disposed abovefirst metallization 820 is a first conductive diffusion barrier layer826 that is made of cobalt-phosphorus according to an electrolessplating embodiment.

[0073] In the photomicrograph drawing depicted in FIG. 8, an upper orsecond metallization 832 is also formed. A second lower ILD layer 828made of SiLK® is disposed over first conductive diffusion barrier layer826 and first hard mask 824. Second lower ILD layer 828 defines a recessthat is filled with a second or upper interconnect 830. Secondinterconnect 830 makes an electrical connection between firstmetallization 820 and a second metallization 832 through the shunt layerthat is first conductive diffusion barrier layer 826. Secondmetallization 832 is disposed in a second upper ILD layer 834 made ofSiLK®. A second or upper hard mask 836, made of a nitride material isdisposed over second upper ILD layer 834, and has an opening thatdefines a characteristic dimension of second metallization 832.

[0074]FIG. 9 is a cross-section of a semiconductor structure 900according to an embodiment. The semiconductor structure 900 isfabricated without the use of etch stop layers according to an exemplaryembodiment. The substrate 910 is an organic ILD material such as SiLK®made by Dow Chemical of Midland, Mich. A first metallization 912 isdisposed in substrate 910. A first hard mask 914, made of a nitridematerial as set forth herein is disposed above substrate 910. First hardmask 914 makes an opening that defines a characteristic dimension (theleft-to-right width) of first metallization 912. Disposed above firstmetallization 912 is a first conductive diffusion barrier layer 916 thatis made of cobalt-phosphorus according to an electroless platingembodiment.

[0075] A first lower ILD layer 918 made of SiLK® is disposed over firstmetallization 912 and first hard mask 914. In a recess, a firstinterconnect 920 makes an electrical connection between firstmetallization 912 and a second metallization 922. Second metallization922 is disposed in a first upper ILD layer 924 made of SiLK®. A secondhard mask 926, made of a nitride material is disposed over first upperILD layer 924, and has an opening that defines a characteristicdimension of second metallization 922. Disposed above secondmetallization 922 is a second conductive diffusion barrier layer 928that is made of cobalt-phosphorus according to an electroless platingembodiment.

[0076] In the drawing depicted in FIG. 9, an upper or thirdmetallization 930 is also formed. A second lower ILD layer 932 made ofSiLK® is disposed over second conductive diffusion barrier layer 928 andsecond hard mask 926. Second lower ILD layer 932 defines a recess thatis filled with a second interconnect 934. Second interconnect 934 makesan electrical connection between second metallization 922 and the thirdor upper metallization 930 through the shunt layer that is secondconductive diffusion barrier layer 928. Third metallization 930 isdisposed in a second upper ILD layer 936 made of SiLK®. A third or upperhard mask 938, made of a nitride material is disposed over second upperILD layer 936, and has an opening that defines a characteristicdimension of third metallization 930. A third conductive diffusionbarrier layer 940 is disposed above and on third metallization 930. Bythis embodiment, the processing is carried out with no etch stop layerssuch as those depicted in the embodiment illustrated in FIG. 8.

[0077] It will be readily understood to those skilled in the art thatvarious other changes in the details, material, and arrangements of theparts and method stages which have been described and illustrated inorder to explain the nature of this invention may be made withoutdeparting from the principles and scope of the invention as expressed inthe subjoined claims.

What is claimed is:
 1. In a microelectronic device, an articlecomprising: a first interconnect disposed above a substrate; a firstconductive diffusion barrier layer disposed above and on the firstinterconnect; an upper interconnect, that is either landed or unlandedand that is disposed above the first interconnect; and an upperconductive diffusion barrier layer disposed above and on the upperinterconnect.
 2. The article according to claim 1, wherein the firstinterconnect is disposed in a first recess, wherein the upperinterconnect is disposed in an upper recess, further including: anitride barrier film disposed in at least one of the first recess and inthe upper recess; and optionally a conductive seed film disposed overthe nitride barrier film.
 3. The article according to claim 1, whereinthe first interconnect is disposed in a first recess, wherein the upperinterconnect is disposed in an upper recess, further including: anitride barrier film disposed in at least one of the first recess and inthe upper recess; a conductive diffusion barrier film disposed over atleast one of the nitride barrier film; and optionally a conductive seedfilm disposed over the conductive diffusion barrier film.
 4. The articleaccording to claim 1, wherein the first interconnect is disposed in arecess in an organic interlayer dielectric layer, wherein the upperinterconnect is a second interconnect that is disposed above and on thefirst conductive diffusion barrier layer, wherein the secondinterconnect is disposed in an inorganic dielectric layer, and furtherincluding: a hard mask disposed over the organic interlayer dielectriclayer wherein the hard mask includes an opening that defines acharacteristic dimension of the first interconnect.
 5. The articleaccording to claim 1, wherein the first interconnect is disposed in arecess in a first interlayer dielectric layer, wherein the upperinterconnect is a second interconnect that is disposed above and on thefirst conductive diffusion barrier layer, wherein the secondinterconnect is disposed in a second interlayer dielectric layer, andfurther including: a first hard mask disposed over the first interlayerdielectric layer wherein the first hard mask includes an opening thatdefines a characteristic dimension of the first interconnect; and asecond hard mask disposed over the second interlayer dielectric layerwherein the second hard mask includes an opening that defines acharacteristic dimension of the second interconnect.
 6. The articleaccording to claim 1, wherein the first interconnect is disposed in afirst recess including an inorganic first bottom ILD layer, an organicfirst top ILD layer, wherein the upper interconnect is disposed in anupper recess including an inorganic upper bottom ILD layer, an organicupper top ILD layer, and further including: a first hard mask disposedover the first top ILD layer, wherein the first hard mask includes anopening that defines a characteristic dimension of the firstinterconnect; an upper hard mask disposed over the upper top ILD layer,wherein the upper hard mask includes an opening that defines acharacteristic dimension of the upper interconnect.
 7. The articleaccording to claim 1, wherein the first interconnect is disposed in afirst recess including an organic first bottom ILD layer, an inorganicfirst top ILD layer, wherein the upper interconnect is disposed in anupper recess including an organic upper bottom ILD layer, an inorganicupper top ILD layer, and further including: a first hard mask disposedover the organic first bottom ILD layer, wherein the first hard maskincludes an opening that defines a characteristic dimension of the firstinterconnect; and an upper hard mask disposed over the organic upperbottom ILD layer, wherein the upper hard mask includes an opening thatdefines a characteristic dimension of the upper interconnect.
 8. Thearticle according to claim 1, wherein at least one of the conductivediffusion barrier layers or films is selected from CuB, CuBP, CuCrB,CuCrBP, CuMoB, CuMoBP, CuWB, CuWBP, CuMnB, CuMnBP, CuTcB, CuTcBP, CuReB,CuReBP, CuNiB, CuNiBP, CuNiCrB, CuNiCrBP, CuNiMoB, CuNiMoBP, CuNiWB,CuNiWBP, CuNiMnB, CuNiMnBP, CuNiTcB, CuNiTcBP, CuNiReB, and CuNiReBP,and wherein optionally Cu is substituted or accompanied by at least oneof Ag and Au.
 9. The article according to claim 1, wherein at least oneof the conductive diffusion barrier layers or films is selected fromNiB, NiBP, NiCrB, NiCrBP, NiMoB, NiMoBP, NiWB, NiWBP, NiMnB, NiMnBP,NiTcB, NiTcBP, NiReB, NiReBP, NiCoB, NiCoBP, NiCoCrB, NiCoCrBP, NiCoMoB,NiCoMoBP, NiCoWB, NiCoWBP, NiCoMnB, NiCoMnBP, NiCoTcB, NiCoTcBP,NiCoReB, and NiCoReBP, and wherein optionally Ni is substituted oraccompanied by at least one of Pd and Pt.
 10. The article according toclaim 1, wherein at least one of the conductive diffusion barrier layersor films is selected from CoB, CoBP, CoCrB, CoCrBP, CoMoB, CoMoBP, CoWB,CoWBP, CoMnB, CoMnBP, CoTcB, CoTcBP, CoReB, CoReBP, NiCoB, CoPdBP,CoPdCrB, CoPdCrBP, CoPdMoB, CoPdMoBP, CoPdWB, CoPdWBP, CoPdMnB,CoPdMnBP, CoPdTcB, CoPdTcBP, CoPdReB, and CoPdReBP, and whereinoptionally Co is substituted or accompanied by at least one of Rh andIr.
 11. An article comprising: a first interconnect disposed above asemiconductor substrate that includes at least one active device; afirst conductive diffusion barrier layer disposed above and on the firstinterconnect; an upper interconnect, that is either landed or unlandedand that is disposed above the first interconnect; and an upperconductive diffusion barrier layer disposed above and on the upperinterconnect.
 12. The article according to claim 11, wherein the firstinterconnect is disposed in a first recess, wherein the first recess iscovered with a first conductive diffusion barrier film, wherein thefirst conductive diffusion barrier film optionally includessubstantially the same material as the first conductive diffusionbarrier layer, wherein the upper interconnect is disposed in an upperrecess, wherein the upper recess is covered with a upper conductivediffusion barrier film, wherein the upper conductive diffusion barrierfilm optionally includes substantially the same material as the upperconductive diffusion barrier layer.
 13. The article according to claim11, wherein at least one of the first- and upper conductive diffusionbarrier layer is a metal or alloy selected from at least one of copper,silver, gold, nickel, palladium, platinum, cobalt, rhodium, iridium,chromium, molybdenum, tungsten, manganese, technetium, rheniumcobalt-nickel, cobalt-nickel-silver, cobalt-nickel-silver-copper,cobalt-silver, cobalt-silver-copper, cobalt-copper,cobalt-copper-nickel, nickel-silver, nickel-silver-copper,nickel-copper, and silver-copper.
 14. A process of forming ametallization comprising: forming a first interlayer dielectric (ILD)layer above a substrate; forming a first recess in the first ILD layer;filling the first recess with a first interconnect; forming a conductivefirst diffusion barrier layer above an on the first interconnect;forming an upper ILD layer above the first conductive diffusion barrierlayer; forming an upper recess in the upper ILD layer to optionallyexpose the first conductive diffusion barrier layer; forming an upperinterconnect in the upper recess; and forming a conductive upperdiffusion barrier layer above and on the upper interconnect.
 15. Theprocess according to claim 14, wherein at least one of forming aconductive first diffusion barrier layer and forming a conductive upperdiffusion barrier layer includes: electro less plating the conductivediffusion barrier layer.
 16. The process according to claim 14, whereinat least one of forming a conductive first diffusion barrier layer andforming a conductive upper diffusion barrier layer includes: vapordepositing the conductive diffusion barrier layer, selected fromchemical vapor deposition, plasma-enhanced chemical vapor deposition,atomic layer chemical vapor deposition, and physical vapor deposition.17. The process according to claim 14, further including: forming abarrier film in at least one of the first recess and the upper recess;and optionally forming a conductive seed film over the barrier film. 18.The process according to claim 14, further including: forming a barrierfilm in at least one of the first recess and the upper recess; forming aconductive diffusion barrier film over at least one of the barrier film;and optionally forming a conductive seed film over the conductivediffusion barrier film.
 19. The process according to claim 14, whereinforming a first ILD layer includes forming an organic ILD layer, furtherincluding: forming a hard mask above and on the organic ILD layer; andpatterning an opening in the hard mask.
 20. The process according toclaim 14, further including: forming a first hard mask above and on thefirst ILD layer; patterning an opening in the first hard mask; formingan upper hard mask above and on the upper ILD layer; patterning anopening in the upper hard mask.
 21. The process according to claim 14,wherein forming a first ILD layer includes: forming an inorganic firstbottom ILD layer; and forming an organic first top ILD layer.
 22. Theprocess according to claim 21, wherein forming a first recess includes:forming a dual-damascene recess in the inorganic first bottom ILD layerand in the organic first top ILD layer.
 23. The process according toclaim 22, further including: forming a first hard mask above and on theorganic first top ILD layer; and patterning an opening in the first hardmask.
 24. The process according to claim 21, wherein forming an upperILD layer includes: forming an inorganic upper bottom ILD layer; andforming an organic upper top ILD layer, and wherein forming an upperrecess includes forming a dual-damascene recess in the inorganic upperbottom ILD layer and in the organic upper top ILD layer.
 25. The processaccording to claim 24, further including: forming an upper hard maskabove and on the upper bottom ILD layer; and patterning an opening inthe upper hard mask.
 26. The process according to claim 14, whereinforming a first ILD layer includes: forming an organic first bottom ILDlayer; and forming an inorganic first top ILD layer.
 27. The processaccording to claim 26, wherein forming a first recess includes: forminga dual-damascene recess in the organic first bottom ILD layer and in theinorganic first top ILD layer.
 28. The process according to claim 27,further including: forming a first hard mask above and on the organicfirst bottom ILD layer; and patterning an opening in the first hardmask.
 29. The process according to claim 26, wherein forming an upperILD layer includes: forming an organic upper bottom ILD layer; andforming an inorganic upper top ILD layer, and wherein forming an upperrecess includes forming a dual-damascene recess in the organic upperbottom ILD layer and in the inorganic upper top ILD layer.
 30. Theprocess according to claim 29, further including: forming an upper hardmask above and on the upper bottom ILD layer; and patterning an openingin the upper hard mask.